1. TFT 양산에 적합한 고생산성
Cleaner · Developer · Coater · Bake등의 각 구성 유닛 외, 인라인되는 노광장치, 검사장치등도 포함한 일괄 시스템 제어.
유닛 간 물류 효율을 추구하여 최대한 생산성을 발휘.
2. Coater부는 Slit방식 도포장치 [Linearcoater™] 또는 에어부상반송방식의 [Levicoater™] 중에서 선택할 수 있습니다.
3. Coating nozzle의 유지보수 작업도 완전하게 자동화하여 업계 제일의 연속 가동을 실현합니다.
4. 공간을 절약할 수 있게끔 설계되어 한정된 생산 공간을 효율적으로 활용하실 수 있습니다.
5. 자원 이용효율에 철저히 따라 진화해 온 SK시리즈는 친환경의 액정 패널 제조에 일조합니다.
Slit Coater Linearcoater™
Superior coating uniformity with efficient resist usage (효율적인 Resist로 우수한 도포 균일성 실현)
양산용 도포장치로 매우 안정적인 도포 성능을 자랑하는 Linearcoater™은 Coater, Developer SK시리즈/SK-N시리즈에
탑재되어 대형 TFT 어레이용으로 세계 시장 점유율 N0.1을 획득하고 있습니다.
1. Slit 방식의 도포 시스템으로 Resist 사용효율이 거의 100%
2. 자사가 개발한 Slit nozzle을 탑재하여 대형 기판에서도 우수한 도포 균일성을 실현
3. 노즐의 유지보수 작업을 완전하게 자동화하여 연속 생산을 실현.
4. 기판의 대형화에 대응한 고속 도포
5. 서로 다른 2종류의 재료 도포에 대응 가능한 2Nozzle 사양도 Line-up
Slit coating (Die coating)
730x920 (G4) or larger
Levitation Linearcoater Levicoater™
Levitation transfer type mass-production coater (에어부상방식의 양산용 Coater)
Linearcoater™의 도포 기술을 에어부상반송방식으로 전개 하였습니다. Coater, Developer SK시리즈에 탑재하여 높은 생산성을 실현합니다.
1. Linearcoater™ 도포 기술을 응용한 고정밀 도포
2. 에어부상반송방식에 의해 한층 더 TACT 단축 실현
3. 기판을 스테이지에 흡착하지 않기 때문에 기판 뒷면에 파티클이 휩쓸려들어가지 않음
4. 기판을 부상이동 시키기 때문에 정전기를 저감
Slit coating (Die coating)
730x920 (G4) or larger
※ Linearcoater, Levicoater는 SCREEN Holding Co., Ltd.의 상표 또는 등록상표입니다.
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