대형 어레이용으로 시럭이 있는 SK 시리즈를 기반으로 개발한 하이스펙 모델입니다.
업계최고 레벨의 Coater, Bake, Developer 프로세스 균일성을 실현했습니다.
LTPS(low-temperature polysilicon)-TFT등 고정밀 패널 생산에 기여합니다.
1. TFT 양산에 적합한 고생산성
Cleaner · Developer · Coater · Bake등의 각 구성 유닛외, 인라인 되는 노광장치, 검사장치등도 포함한 일괄 시스템 제어.
유니트간 물류 효율을 추구하여 최대한 생산성을 발휘.
2. Coater부는 Slit방식 도포장치 [Linearcoater™] 를 탑재.
3. Coating nozzle의 유지 보수 작업도 완전 자동화. 업계 제일의 연속 가동을 실현.
4. 공간 절약설계 이므로 한정된 생산 공간을 효율적으로 활용하실 수 있습니다.
5. 자원 이용효율에 철저히 따라 진화해 온 SK시리즈는 친환경 디스플레이 제조에 일조합니다.
730x920 (G4) or larger
※ Linearcoater는 SCREEN Holding Co., Ltd.의 상표 또는 등록상표입니다.
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