세계 시장 점유율 No.1의 TFT 어레이용 Slit식 도포장치 [Linearcoater™]를 Panel level package(FOPLP)용으로 전개하였습니다.
노광/ TMAH현상 등 처리장치와의 인라인도 가능합니다.
1. 휼륭한 Coating uniformity
2. 고정밀 프로세스에 대응
3. Warped panel등에 대응
4. Coater/ Developer system으로 양산대응 가능
노광/ TMAH 현상 등의 처리장치와 인라인하여 양산을 지원 합니다.
※ Linearcoater는 SCREEN Holding Co., Ltd.의 상표 또는 등록상표입니다.
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